AMU (Automated Matching Unit)
AMU (Automated Matching Unit) is an electronic sub-assembly used on process tools using plasma such as PECVD and Dry Etch. The process chamber circuit impedance must be managed to ignite and sustain this plasma much like a complex fluorescent light. Each match is designed specific to the process the tool supports. We are able to support all Trazar AMU designs. Customization and optimization is possible.
| Description | Our P/N | OEM P/N | OEM Process Tool |
|---|---|---|---|
| AMU 10D-2 | 2813-001 | 914-92003-00 | Mattson Technology Aspen I and Aspen II |
| AMU 10D-1 | 2741-001 | 914-92003-00 | Mattson Technologies Aspen 1 |
| AMU 10D-4, F47 | 4032-002 | 553-22801-00 | Mattson Technology Aspen III |
| AMU 10D-4 | 4032-001 | 553-12708-00 | Mattson Technology Aspen III |
| AMU 2-1 (V) | 3944-001 | 27-121645-00 | Novellus / LAM Research Sequel, Concept I & II |
| AMU 10E-2 | 3502-002 | 27-118072-00 | Novellus / LAM Research Speed |
| AMU 2-1(H) | 2218-001 | 27-032653-00 | Novellus / LAM Research Sequel, Concept I & II |